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Report: Chinese fabs amassed ~343 immersion DUV systems, spurring calls for a full export ban
2026-10-03•SiTech AI Team

Report: Chinese fabs amassed ~343 immersion DUV systems, spurring calls for a full export ban

Chinese-owned fabs had roughly 343 immersion DUV (DUVi) lithography systems by early 2026, a new Center for Technology & Statecraft report estimates. It urges a China-wide ban on DUVi exports plus tighter servicing and spare-parts controls.